Hysteresis in aluminum oxides films growth with pulsed reactive sputtering 铝靶脉冲反应溅射沉积氧化铝薄膜中的迟滞回线的研究
The designed films of sio2 and sio2 / si are prepared on sample and hemisphere dome of sapphire by radio frequency magnetron reactive sputtering method 利用射频磁控反应溅射法,在蓝宝石试片和半球形头罩上制备出所设计的sio _ 2和sio _ 2 si增透膜系。